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BJL CLASSMARK
KDL CLASSMARK
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BJL, Hull
KDL, Scarborough
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Record:
Conference
European Mask and Lithography Conference (23rd : 2007 : Grenoble, France)
Title
23rd European Mask and Lithography Conference : 22-26 January 2007.
Publication Info
New York : IEEE, 2011.
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Descript
1 online resource (230 pages)
ISBN
9783800730797 (print)
Click on the terms below to find similar items in the catalogue
Conference
European Mask and Lithography Conference (23rd : 2007 : Grenoble, France)
Subject
Microlithography -- Congresses.
Integrated circuits -- Masks -- Congresses.
Descript
1 online resource (230 pages)
ISBN
9783800730797 (print)
Conference
European Mask and Lithography Conference (23rd : 2007 : Grenoble, France)
Subject
Microlithography -- Congresses.
Integrated circuits -- Masks -- Congresses.
Subject
Microlithography -- Congresses.
Integrated circuits -- Masks -- Congresses.
Descript
1 online resource (230 pages)
ISBN
9783800730797 (print)
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