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Conference European Mask and Lithography Conference (22nd : 2006 : Dresden, Germany)
European Mask and Lithography Conference (22nd : 2006 : Dresden, Germany)
European Mask and Lithography Conference (22nd : 2006 : Dresden, Germany)
Title 22nd European Mask and Lithography Conference [electronic resource] : 23-26 January 2006.
Publication Info New York : IEEE, 2011.


Subject Microlithography -- Congresses.
Integrated circuits -- Masks -- Congresses.
Descript 1 online resource (175 pages)
Note .
ISBN 9783800729319 (print)

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