LEADER 00000pam 2200469 a 4500
001 72014857884
003 UkLCURL
008 081001s2012 flua b |0|1 0|eng d
020 9780849331800|q(set)
020 0849331803|q(set)
020 9781420055115|q(v. 1)
020 1420055119|q(v. 1)
020 9781420055191|q(v. 2)
020 1420055194|q(v. 2)
020 9781420055160|q(v. 3)
020 142005516X|q(v. 3)
035 (Uk)014857884
040 StDuBDS|beng|cStDuBDS|dUk
049 |jCU|k72014857884|lb
050 4 |fq|aTK 7836 M1
082 04 621.38152|223
100 1 Madou, Marc J.
245 10 Fundamentals of microfabrication and nanotechnology /
|cMarc J. Madou.
246 33 Fundamentals of microfabrication
250 3rd ed.
260 Boca Raton, Fla. ;|aLondon :|bCRC,|cc2012.
300 3 v. :|bill. (some col.) ;|c29 cm.
500 Rev. ed. of: Fundamentals of microfabrication. 2002.
505 0 v. 1. Solid-state physics, fluidics, and analytical
techniques in micro- and nanotechnology -- v. 2.
Manufacturing techniques for microfabrication and
nanotechnology -- v. 3. From MEMS to bio-MEMS and bio-NEMS
: manufacturing techniques and applications.
650 0 Microelectronics.
650 0 Integrated circuits|xDesign and construction.
650 0 Microelectromechanical systems|xDesign and construction.
650 0 Machining.
650 0 Lasers|xIndustrial applications.
650 0 Microelectronic packaging.
650 0 Microfabrication.
650 0 Nanostructured materials|xDesign and construction.
