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Title Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A / Tomas Diaz de la Rubia ... [et al.].
Publication Info Pittsburg, Pa. : Materials Research Society, 1997.


LOCATION SHELVED AT LOAN TYPE STATUS
 BJL 3rd Floor  TK 7871.85 D3  8 WEEK LOAN  AVAILABLE

Descript 541p.
ISBN 1558993738
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Series Materials Research Society symposium proceedings ; v.469
Subject Semiconductors -- Defects.
Semiconductor doping.
Silicon crystals -- Defects.
Alt author Diaz de la Rubia, Tomas.
Descript 541p.
ISBN 1558993738
Series Materials Research Society symposium proceedings ; v.469
Subject Semiconductors -- Defects.
Semiconductor doping.
Silicon crystals -- Defects.
Alt author Diaz de la Rubia, Tomas.
LOCATION SHELVED AT LOAN TYPE STATUS
 BJL 3rd Floor  TK 7871.85 D3  8 WEEK LOAN  AVAILABLE

Subject Semiconductors -- Defects.
Semiconductor doping.
Silicon crystals -- Defects.
Descript 541p.
Alt author Diaz de la Rubia, Tomas.
ISBN 1558993738

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