Descript |
3 v. : ill. (some col.) ; 29 cm. |
Edition |
3rd ed. |
Note |
Rev. ed. of: Fundamentals of microfabrication. 2002. |
Contents |
v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications. |
ISBN |
9780849331800 (set) |
|
0849331803 (set) |
|
9781420055115 (v. 1) |
|
1420055119 (v. 1) |
|
9781420055191 (v. 2) |
|
1420055194 (v. 2) |
|
9781420055160 (v. 3) |
|
142005516X (v. 3) |
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