LEADER 00000nam 2200205 a 4500
001 0195105087
007 t
008 960624s1996 xxu r 001 eng
020 0195105087
040 CURLLC
050 4 TK 7871.85 C1
100 1 Campbell, Stephen A.
245 14 The science and engineering of microelectronic
fabrication.
260 New York :|bOxford University Press,|c1996.
300 536p.
440 0 Oxford series in electrical engineering
650 0 Semiconductors|xDesign and construction.
|