LEADER 00000nam 22003138 4500
001 99010350844
003 UkLCURL
008 970901s1997 enk || 000 ||eng
020 0852969104
020 0852969066|q(v.1)
020 0852969112|q(v.2)
035 (Uk)010350844
040 StDuBDS|dUk
049 |jCU|k99010350844|lb|m-
050 4 TK 7836 H2
082 04 621.381531|221
245 00 Handbook of microlithography, micromachining, and
microfabrication /|cP. Rai-Choudhury, editor.
260 London :|bInstitution of Electrical Engineers,|cc1997.
300 2v.
440 4 The IEE materials and devices series ;|v12
505 0 |gv.1.|tMicrolithography. --|gv.2.|tMicromachining and
microfabrication.
650 0 Microlithography.
650 0 Micromachining.
650 0 Microfabrication.
700 1 Rai-Choudhury, P.
710 2 Institution of Electrical Engineers.
