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Record:
Author
Wasa, Kiyotaka.
Title
Handbook of sputter deposition technology : principles, technology, and applications / by Kiyotaka Wasa and Shigeru Hayakawa.
Publication Info
Park Ridge, N.J. : Noyes Publications, 1993.
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Descript
304p.
ISBN
0815512805
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Author
Wasa, Kiyotaka.
Series
Materials science and process technology series
Subject
Cathode sputtering (Plating process)
Thin films.
Alt author
Hayakawa, Shigeru.
Descript
304p.
ISBN
0815512805
Author
Wasa, Kiyotaka.
Series
Materials science and process technology series
Subject
Cathode sputtering (Plating process)
Thin films.
Alt author
Hayakawa, Shigeru.
Subject
Cathode sputtering (Plating process)
Thin films.
Descript
304p.
Alt author
Hayakawa, Shigeru.
ISBN
0815512805
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