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Author Madou, Marc J.
Title Fundamentals of microfabrication and nanotechnology / Marc J. Madou.
Alternative Title Fundamentals of microfabrication
Publication Info Boca Raton, Fla. ; London : CRC, c2012.
Edition 3rd ed.


LOCATION SHELVED AT LOAN TYPE STATUS
 BJL 3rd Floor  q TK 7836 M1  v. 1  8 WEEK LOAN  AVAILABLE
 BJL 3rd Floor  q TK 7836 M1  v. 2  8 WEEK LOAN  AVAILABLE
 BJL 3rd Floor  q TK 7836 M1  v. 3  8 WEEK LOAN  AVAILABLE

Descript 3 v. : ill. (some col.) ; 29 cm.
Edition 3rd ed.
Note Rev. ed. of: Fundamentals of microfabrication. 2002.
Contents v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications.
ISBN 9780849331800 (set)
0849331803 (set)
9781420055115 (v. 1)
1420055119 (v. 1)
9781420055191 (v. 2)
1420055194 (v. 2)
9781420055160 (v. 3)
142005516X (v. 3)
Click on the terms below to find similar items in the catalogue
Author Madou, Marc J.
Subject Microelectronics.
Integrated circuits -- Design and construction.
Microelectromechanical systems -- Design and construction.
Machining.
Lasers -- Industrial applications.
Microelectronic packaging.
Microfabrication.
Nanostructured materials -- Design and construction.
Alternative Title Fundamentals of microfabrication
Descript 3 v. : ill. (some col.) ; 29 cm.
Edition 3rd ed.
Note Rev. ed. of: Fundamentals of microfabrication. 2002.
Contents v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications.
ISBN 9780849331800 (set)
0849331803 (set)
9781420055115 (v. 1)
1420055119 (v. 1)
9781420055191 (v. 2)
1420055194 (v. 2)
9781420055160 (v. 3)
142005516X (v. 3)
Author Madou, Marc J.
Subject Microelectronics.
Integrated circuits -- Design and construction.
Microelectromechanical systems -- Design and construction.
Machining.
Lasers -- Industrial applications.
Microelectronic packaging.
Microfabrication.
Nanostructured materials -- Design and construction.
Alternative Title Fundamentals of microfabrication
LOCATION SHELVED AT LOAN TYPE STATUS
 BJL 3rd Floor  q TK 7836 M1  v. 1  8 WEEK LOAN  AVAILABLE
 BJL 3rd Floor  q TK 7836 M1  v. 2  8 WEEK LOAN  AVAILABLE
 BJL 3rd Floor  q TK 7836 M1  v. 3  8 WEEK LOAN  AVAILABLE

Subject Microelectronics.
Integrated circuits -- Design and construction.
Microelectromechanical systems -- Design and construction.
Machining.
Lasers -- Industrial applications.
Microelectronic packaging.
Microfabrication.
Nanostructured materials -- Design and construction.
Descript 3 v. : ill. (some col.) ; 29 cm.
Note Rev. ed. of: Fundamentals of microfabrication. 2002.
Contents v. 1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- v. 2. Manufacturing techniques for microfabrication and nanotechnology -- v. 3. From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications.
ISBN 9780849331800 (set)
0849331803 (set)
9781420055115 (v. 1)
1420055119 (v. 1)
9781420055191 (v. 2)
1420055194 (v. 2)
9781420055160 (v. 3)
142005516X (v. 3)

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