LEADER 00000nam  22003138  4500 
001    99010350844 
003    UkLCURL 
008    970901s1997    enk    ||     000 ||eng   
020    0852969104 
020    0852969066 (v.1) 
020    0852969112 (v.2) 
035    (Uk)010350844 
040    StDuBDS|dUk 
049    |jCU|k99010350844|lb|m- 
050  4 TK 7836 H2 
082 04 621.381531|221 
245 00 Handbook of microlithography, micromachining, and 
       microfabrication /|cP. Rai-Choudhury, editor. 
260    London :|bInstitution of Electrical Engineers,|cc1997. 
300    2v. 
440  4 The IEE materials and devices series ;|v12 
505 0  |gv.1.|tMicrolithography. --|gv.2.|tMicromachining and 
       microfabrication. 
650  0 Microlithography. 
650  0 Micromachining. 
650  0 Microfabrication. 
700 1  Rai-Choudhury, P. 
710 2  Institution of Electrical Engineers. 
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