LEADER 00000nam 22003138 4500 001 99010350844 003 UkLCURL 008 970901s1997 enk || 000 ||eng 020 0852969104 020 0852969066|q(v.1) 020 0852969112|q(v.2) 035 (Uk)010350844 040 StDuBDS|dUk 049 |jCU|k99010350844|lb|m- 050 4 TK 7836 H2 082 04 621.381531|221 245 00 Handbook of microlithography, micromachining, and microfabrication /|cP. Rai-Choudhury, editor. 260 London :|bInstitution of Electrical Engineers,|cc1997. 300 2v. 440 4 The IEE materials and devices series ;|v12 505 0 |gv.1.|tMicrolithography. --|gv.2.|tMicromachining and microfabrication. 650 0 Microlithography. 650 0 Micromachining. 650 0 Microfabrication. 700 1 Rai-Choudhury, P. 710 2 Institution of Electrical Engineers.
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