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Title High density plasma sources : design, physics, and performance / edited by Oleg A. Popov.
Publication Info Park Ridge, N.J. : Noyes Publications, 1995.


LOCATION SHELVED AT LOAN TYPE STATUS
 BJL 3rd Floor  QC 718.5 D4 H6  8 WEEK LOAN  AVAILABLE

Descript 445p.
ISBN 0815513771
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Series Materials science and process technology series
Subject Plasma density.
Plasma generators.
High temperature plasmas.
Alt author Popov, Oleg A.
Descript 445p.
ISBN 0815513771
Series Materials science and process technology series
Subject Plasma density.
Plasma generators.
High temperature plasmas.
Alt author Popov, Oleg A.
LOCATION SHELVED AT LOAN TYPE STATUS
 BJL 3rd Floor  QC 718.5 D4 H6  8 WEEK LOAN  AVAILABLE

Subject Plasma density.
Plasma generators.
High temperature plasmas.
Descript 445p.
Alt author Popov, Oleg A.
ISBN 0815513771

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