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Title
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A / Tomas Diaz de la Rubia ... [et al.].
Publication Info
Pittsburg, Pa. : Materials Research Society, 1997.
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LOCATION
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STATUS
BJL 3rd Floor
TK 7871.85 D3
8 WEEK LOAN
AVAILABLE
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Descript
541p.
ISBN
1558993738
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Series
Materials Research Society symposium proceedings ; v.469
Subject
Semiconductors -- Defects.
Semiconductor doping.
Silicon crystals -- Defects.
Alt author
Diaz de la Rubia, Tomas.
Descript
541p.
ISBN
1558993738
Series
Materials Research Society symposium proceedings ; v.469
Subject
Semiconductors -- Defects.
Semiconductor doping.
Silicon crystals -- Defects.
Alt author
Diaz de la Rubia, Tomas.
LOCATION
SHELVED AT
LOAN TYPE
STATUS
BJL 3rd Floor
TK 7871.85 D3
8 WEEK LOAN
AVAILABLE
Subject
Semiconductors -- Defects.
Semiconductor doping.
Silicon crystals -- Defects.
Descript
541p.
Alt author
Diaz de la Rubia, Tomas.
ISBN
1558993738
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