LEADER 00000nam 2200229 a 4500
001 1558993738
007 t
008 971104s1997 xxu rb 101 eng
020 1558993738
040 CURLLC
050 4 TK 7871.85 D3
245 00 Defects and diffusion in silicon processing :|bsymposium
held April 1-4, 1997, San Francisco, California, U.S.A /
|cTomas Diaz de la Rubia ... [et al.].
260 Pittsburg, Pa. :|bMaterials Research Society,|c1997.
300 541p.
440 0 Materials Research Society symposium proceedings ;|vv.469
650 0 Semiconductors|xDefects.
650 0 Semiconductor doping.
650 0 Silicon crystals|xDefects.
700 1 Diaz de la Rubia, Tomas.
946 650 |a & |x subfields only. In at least one case all
subfields comprise single words only -- Check for possible
Geac subject headings
