LEADER 00000nam 2200253 a 4500
001 0993825
007 t
008 001708 3 1993 000 eng
020 0444899081
040 CURLOC
050 4 |fq|aTK 7872 S4 S4
110 2 Symposium D on Diagnostic Techniques for Semiconductor
Materials Analysis and Fabrication Process Control of the
1992 E-MRS Spring Conference (1992: Strasbourg).
245 00 Semiconductor materials analysis and fabrication process
control :|bproceedings of Symposium D on Diagnostic
Techniques for Semiconductor Materials Analysis and
Fabrication Process Control of the 1992 E-MRS Spring
Conference, Strasbourg, France, June 2-5, 1992 /|cedited
by G.M. Crean, R. Stuck, and J.A. Woollam.
260 Amsterdam :|bNorth-Holland,|c1993.
300 338p.
440 0 European materials research society symposia proceedings;
34
700 0 Crean, G.M.
700 0 Stuck, R.
700 0 Woollam, J.A.
946 6XX absent
