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Title Handbook of microlithography, micromachining, and microfabrication / P. Rai-Choudhury, editor.
Publication Info London : Institution of Electrical Engineers, c1997.


LOCATION SHELVED AT LOAN TYPE STATUS
 BJL 3rd Floor  TK 7836 H2  v.1  8 WEEK LOAN  AVAILABLE
 BJL 3rd Floor  TK 7836 H2  v.2  8 WEEK LOAN  AVAILABLE

Descript 2v.
Contents v.1. Microlithography. -- v.2. Micromachining and microfabrication.
ISBN 0852969104
0852969066 (v.1)
0852969112 (v.2)
Click on the terms below to find similar items in the catalogue
Series The IEE materials and devices series ; 12
Subject Microlithography.
Micromachining.
Microfabrication.
Alt author Rai-Choudhury, P.
Institution of Electrical Engineers.
Descript 2v.
Contents v.1. Microlithography. -- v.2. Micromachining and microfabrication.
ISBN 0852969104
0852969066 (v.1)
0852969112 (v.2)
Series The IEE materials and devices series ; 12
Subject Microlithography.
Micromachining.
Microfabrication.
Alt author Rai-Choudhury, P.
Institution of Electrical Engineers.
LOCATION SHELVED AT LOAN TYPE STATUS
 BJL 3rd Floor  TK 7836 H2  v.1  8 WEEK LOAN  AVAILABLE
 BJL 3rd Floor  TK 7836 H2  v.2  8 WEEK LOAN  AVAILABLE

Subject Microlithography.
Micromachining.
Microfabrication.
Descript 2v.
Contents v.1. Microlithography. -- v.2. Micromachining and microfabrication.
Alt author Rai-Choudhury, P.
Institution of Electrical Engineers.
ISBN 0852969104
0852969066 (v.1)
0852969112 (v.2)

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